Ultra-Low Temperature Cryogenic Pump for PVD & CVD
Achieve ultra-clean, contaminant-free vacuum with rapid water & oil vapor condensation for high-performance PVD & CVD processes.
Overview
In high‑vacuum systems, most residual gas molecules are water vapour, often combined with other gases. These highly polar water molecules can contaminate coatings and reduce pump‑down efficiency. Traditional high‑temperature bake‑outs only desorb water from chamber surfaces, and conventional cold traps capture only a portion of the vapour. The Pathlink Water Vapour & Oil Trap employs proprietary cryogenic coil technology to rapidly condense and adsorb water and oil vapour molecules, preventing oil backstreaming and enhancing coating quality. The system delivers fast cool‑down, stable low‑temperature operation, and energy efficiency. Featuring an imported compressor and eco-friendly refrigerant, it ensures reliable performance while minimizing maintenance and operating costs.
Key Features
- Rapid adsorption of water and oil vapour – reduces pump-down time by 60 – 90%.
- Enhances coating quality – prevents oil backstreaming, avoids contamination, and produces a clean, uniform film.
- Fast cooling – reaches −120 °C within 1 minute, with a minimum temperature down to −150 °C.
- Quick pre‑heat and cooldown – 30-second degassing pre‑heat, stable temperature control, and cool-down within 2 minutes.
- Automated control – touch‑screen interface with PLC-based automation for seamless operation.
- Dual output design – supports two independent cooling outputs within one unit.
- Imported compressor & eco-friendly refrigerant – guarantees reliability and environmental compliance.
- Dual inlet/outlet temperature display – monitors inlet, outlet, and internal machine temperatures simultaneously.
- Adjustable defrost temperature – customizable defrost set-point for optimized performance.
- Multiple temperature indicators – includes water-bath and exhaust temperature displays.
- Safety alerts – alarms for water shortage and excessive water temperature.
- Compressor protection – safeguards against high exhaust temperature and pressure.
- Local & remote control – allows easy switching between on-site and remote operation.
- RS-485 interface – enables computer connection for data logging and precise temperature control.