Ultra-Low Temperature Cryogenic Pump for PVD & CVD

Achieve ultra-clean, contaminant-free vacuum with rapid water & oil vapor condensation for high-performance PVD & CVD processes.

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Pathlink Cryogenic Pump

Overview

In high-vacuum systems, most residual gas molecules are water vapour, often combined with other gases. The Pathlink Water Vapour & Oil Trap employs proprietary cryogenic coil technology to rapidly condense and adsorb water and oil vapour molecules, preventing oil backstreaming and enhancing coating quality. The system delivers fast cool-down, stable low-temperature operation, and energy efficiency — featuring an imported compressor and eco-friendly refrigerant.

Pathlink Cryogenic Pump unit

Key Features

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Rapid Vapour AdsorptionReduces pump-down time by 60–90% through rapid adsorption of water and oil vapour.
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Enhanced Coating QualityPrevents oil backstreaming and contamination, producing a clean, uniform film.
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Fast CoolingReaches −120 °C within 1 minute; minimum temperature down to −150 °C.
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Quick Pre-heat & Cooldown30-second degassing pre-heat and cool-down within 2 minutes.
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Automated ControlTouch-screen interface with PLC-based automation for seamless operation.
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Dual Output DesignSupports two independent cooling outputs within one unit.
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Eco-friendly CompressorImported compressor with eco-friendly refrigerant for reliability and compliance.
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Temperature MonitoringDual inlet/outlet display monitors inlet, outlet, and internal machine temperatures.
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Adjustable DefrostCustomizable defrost set-point for optimized performance across applications.
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Safety AlertsAlarms for water shortage, excessive water temperature, and compressor protection.
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Local & Remote ControlEasy switching between on-site and remote operation modes.
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RS-485 InterfaceComputer connection for data logging and precise temperature control.